Solid-state image pickup element and image pickup apparatus

ABSTRACT

Disclosed herein is a solid-state image pickup element, including: a photoelectric conversion region; a transistor; an isolation region of a first conductivity type configured to isolate the photoelectric conversion region and the transistor from each other; a well region of the first conductivity type having the photoelectric conversion region, the transistor, and the isolation region of the first conductivity type formed therein; a contact portion configured to supply an electric potential used to fix the well region to a given electric potential; and an impurity region of the first conductivity type formed so as to extend in a depth direction from a surface of the isolation region of the first conductivity type in the isolation region of the first conductivity type between the contact portion and the photoelectric conversion region, and having a sufficiently higher impurity concentration than that of the isolation region of the first conductivity type.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a solid-state image pickup element andan image pickup apparatus, such as a camera, including the same.

2. Description of the Related Art

A configuration including a photodiode utilizing a pn junction of asemiconductor as a photoelectric conversion element is known for asolid-state image pickup element (image sensor) using a semiconductor.

Such a solid-state image pickup element is mounted to many apparatusessuch as a digital camera, a video camera, a monitoring camera, a copyingmachine, and a facsimile.

Also, a so-called CMOS (complementary metal oxide semiconductor) typesolid-state image pickup element which is manufactured in a CMOSprocess, including a peripheral circuit is used as such a solid-stateimage pickup element in many cases.

FIG. 20 is a schematic block diagram showing an example of aconfiguration of a CMOS type solid-state image pickup element.

As known in FIG. 20, the CMOS type solid-state image pickup elementincludes plural pixels 51 which are disposed in a matrix and each ofwhich carries out photoelectric conversion, vertical signal lines 52through which signals are taken out from the pixels 51, respectively, avertical selection circuit 53, a horizontal selection/signal processingcircuit 54, and an output circuit 55 on the same semiconductorsubstrate. In FIG. 20, reference numeral 56 designates an imagecapturing area.

FIG. 21 is a circuit diagram showing a configuration of a unit pixel ofthe CMOS type solid-state image pickup element shown in FIG. 20.

As shown in FIG. 21, the unit pixel includes a photodiode PD serving asa photoelectric conversion element, a transfer transistor 61, a resettransistor 62, an amplification transistor 63, a selection transistor64, a vertical signal line 65, and a floating diffusion area C_(FD).

The reset transistor 62, the transfer transistor 61, and the selectiontransistor 64 are connected to a reset line RST, a transfer line TX, anda horizontal selection line SEL, respectively, and are driven inaccordance with pulse signals from the vertical selection circuit 53shown in FIG. 20.

The photodiode PD is connected in one end thereof to the ground, andconverts a light made incident thereto into electrons (or holes) byphotoelectric conversion to accumulate therein the resulting electriccharges (electrons or holes). The other end of the photodiode PD isconnected to the floating diffusion area C_(FD) through the transfertransistor 61. Thus, by turning ON the transfer line TX, the electriccharges are transferred from the photodiode PD to the floating diffusionarea C_(FD).

One end of the floating diffusion area C_(FD) is connected to a gateelectrode of the amplification transistor 63, and is also connected tothe vertical signal line 65 through the selection transistor 64. Pluralunit pixels are connected to the vertical signal line 65. Thus, theselection transistor 65 connected to a certain specific vertical signalline 65 is turned ON, whereby a signal from a desired photodiode PD isoutputted. The vertical signal line 65 is connected to a transistor(constant current source) 66 biased by a constant voltage and composes aso-called source follower circuit in combination with the amplificationtransistor 63.

In addition, FIG. 22 shows an example of a planar layout of the unitpixel of the CMOS type solid-state image pickup element.

For isolation of the photodiode PD and the transistors, a p-type wellregion (not shown) is provided in the circumference of the photodiode PDand the transistors.

Although heretofore, a well constant is provided only in thecircumference of the pixel area, in this example, the contact isprovided in each of the pixels along with the multiple pixel promotion.That is to say, for the purpose of connecting a metallic wire 69 and ap-type well region to each other, a well contact 68 is provided in a topleft corner of a photoelectric conversion area 67 including aphotodiode.

Here, FIG. 23 is a cross sectional view taken on line X-X′ of FIG. 22 inthe case where isolation between elements is carried out by an insulatorand a p-type region. An upper metallic wiring layer is omitted inillustration in FIG. 23.

Although the isolation between the elements is basically carried out byan insulator 76, normally, a p-type region 77 is formed under theinsulator 76. The p-type region 77 is connected together with a p⁺-typeregion 74 on the surface of the photodiode to the well contact 68.

Although in FIG. 23, the inter-element isolation is carried out by boththe isolation 76 and the p-type region 77, as with a cross sectionalview shown in FIG. 24 similar to FIG. 23, the inter-element isolationregion can be formed by only the p-type region 77.

In this case as well, similarly to the case of FIG. 23, both the p-typeregion 77 for the inter-element isolation, and the p⁺-type region 74 onthe photodiode are connected to the well contact 68.

As shown in FIGS. 23 and 24, the p-type region 77 for the inter-elementisolation is connected to the well contact 68. In this structure,however, there is known a problem that electrons e⁻ as minority carriersare injected from the well contact 68 to the p-type region 77. Thisproblem is described in Japanese Patent Laid-Open No. 2006-32385.

That is to say, this problem is such that as indicated by arrows inFIGS. 23 and 24, respectively, the injected electrons e⁻ are diffusedwithin the p-type region 77 to flow into the n-type region 73 in whichthe electrons generated in the photodiode by the photoelectricconversion are accumulated, and turn into a dark current, therebydeteriorating the image quality.

Now, as shown in a circuit diagram of FIG. 25, a so-called sharing pixelconfiguration in which the floating diffusion area C_(FD), theamplification transistor 63, and the selection transistor 64 are sharedamong plural photodiodes is generally known.

In the circuit configuration shown in FIG. 21, the configuration isadopted such that one photodiode PD is connected to one amplificationtransistor 63. On the other hand, in the circuit configuration shown inFIG. 25, a configuration is adopted such that four photodiodes PD1, PD2,PD3, and PD4 are connected to one amplification transistor 63. That isto say, the amplification transistor 63 and the like are shared amongfour pixels. It is noted that the transfer transistor 61 is providedevery pixel.

SUMMARY OF THE INVENTION

FIG. 26 shows an example of a planar layout in the case where aconfiguration is adopted such that an amplification transistor and thelike are shared between two pixels.

In an area indicated by a broken line 80 in FIG. 26, the photodiodeconversion regions 67 of two pixels are connected commonly to thefloating diffusion region FD and the amplification transistor 63.

The problem, shown in FIGS. 23 and 24, that the electrons flow into thephotodiode is similarly caused even in a structure as shown in FIG. 26that the amplification transistor and the like are shared between thetwo pixels.

Here, FIG. 27 shows a cross sectional view taken on line Y-Y′ of FIG. 26in the case where the pixel isolation region is formed by the insulatorand the p-type region. In addition, FIG. 28 shows a cross sectional viewtaken on line Y-Y′ of FIG. 26 in the case where the pixel isolationregion is formed by only the p-type region.

Referring to FIGS. 27 and 28, the well contact 68 is formed in a p⁺-typeregion 78 which is formed separately from the p⁺-type region 74 on thesurface of the photoelectric conversion region 67. An output contact 70is connected to an n⁺-type region 79 of the selection transistor 64 onthe left side of each of FIGS. 27 and 28.

In this case as well, the electrons e⁻ injected from the well contact 68pass through the p-type region 77 to flow into the n-type region 73 ofthe photodiode.

FIG. 29 is an energy band diagram showing a situation in which theelectron e⁻ injected from the well contact 68 flows into the photodiode.

Although a portion connected to the well contact 68 is normally formedas the p⁺-type region 78, a p-type impurity concentration of the p-typeregion 77 in the circumference of the p⁺-type region 78 is slightly low.For this reason, the electron e⁻ injected from the well contact 68, asindicated by an arrow of FIG. 29, flows into the n-type region 73 of thephotodiode without encountering a barrier.

The present invention has been made in order to solve the problemsdescribed above, and it is therefore desirable to provide a solid-stateimage pickup element in which flowing of electrons injected from a wellcontact into a photodiode is suppressed to reduce generation of a darkcurrent, thereby obtaining satisfactory image quality, and an imagepickup apparatus including the same.

In order to attain the desire described above, according to anembodiment of the present invention, there is provided a solid-stateimage pickup element, including:

a photoelectric conversion region provided in each of pixels;

a transistor provided for the photoelectric conversion region of each ofthe pixels;

an isolation region of a first conductivity type configured to isolatethe photoelectric conversion region and the transistor from each other;

a well region of the first conductivity type having the photoelectricconversion region, the transistor, and the isolation region of the firstconductivity type formed therein;

a contact portion formed on the isolation region of the firstconductivity type configured to supply an electric potential used to fixthe well region of the first conductivity type to a given electricpotential; and

an impurity region of the first conductivity type formed so as to extendin a depth direction from a surface of the isolation region of the firstconductivity type in the isolation region of the first conductivity typebetween the contact portion and the photoelectric conversion region, andhaving a sufficiently higher impurity concentration than that of theisolation region of the first conductivity type.

According to the solid-state image pickup element of the embodiment ofthe present invention, the impurity region of the first conductivitytype having the sufficiently higher impurity concentration than that ofthe isolation region of the first conductivity type is formed in theisolation region of the first conductivity type between the contactportion and the photoelectric conversion region.

As a result, the impurity region of the first conductivity type acts asa potential barrier against a minority carrier (electron or hole)injected from the contact portion. Thus, it is possible to suppress orprevent the flowing of the minority carrier into the photoelectricconversion region.

Therefore, it is possible to suppress or prevent the generation of thedark current due to the flowing of the minority carrier into thephotoelectric conversion region.

According to another embodiment of the present invention, there isprovided a solid-state image pickup element, including:

a photoelectric conversion region provided in each of pixels;

a transistor provided for the photoelectric conversion region of each ofthe pixels and including at least a transfer transistor and anamplification transistor, the transistor other than the transfertransistor being formed commonly to the photoelectric conversion regionsof the plural pixels;

an isolation region of a first conductivity type configured to isolatethe photoelectric conversion region and the transistor from each other;

a well region of the first conductivity type having the photoelectricconversion region, the transistor, and the isolation region of the firstconductivity type formed therein;

a contact portion formed on the isolation region of the firstconductivity type configured to supply an electric potential used to fixthe well region of the first conductivity type to a given electricpotential; and

a barrier formed in the isolation region of the first conductivity typebetween the contact portion and the photoelectric conversion region, andprovided against a minority carrier injected from the contact portion.

According to the solid-state image pickup element of another embodimentof the present invention, the barrier is formed in the isolation regionof the first conductivity type between the contact portion and thephotoelectric conversion region and is provided against the minoritycarrier injected from the contact portion.

The provision of the barrier makes it possible to suppress or preventthe flowing of the minority carrier into the photoelectric conversionregion.

Therefore, it is possible to suppress or prevent the generation of thedark current due to the flowing of the minority carrier into thephotoelectric conversion region.

According to still another embodiment of the present invention, there isprovided an image pickup apparatus, including:

a solid-state image pickup element having a photoelectric conversionregion provided in each of pixels, a transistor provided for thephotoelectric conversion region of each of the pixels, an isolationregion of a first conductivity type configured to isolate thephotoelectric conversion region and the transistor from each other, awell region of the first conductivity type having the photoelectricconversion region, the transistor, and the isolation region of the firstconductivity type formed therein, a contact portion formed on theisolation region of the first conductivity type configured to supply anelectric potential used to fix the well region of the first conductivitytype to a given electric potential, and an impurity region of the firstconductivity type formed so as to extend in a depth direction from asurface of the isolation region of the first conductivity type in theisolation region of the first conductivity type between the contactportion and the photoelectric conversion region, and having asufficiently higher impurity concentration than that of the isolationregion of the first conductivity type;

a light condensing optical portion configured to condens an incidentlight; and

a signal processing portion configured to process a signal obtained inthe solid-state image pickup element by photoelectric conversion.

According to yet another embodiment of the present invention, there isprovided an image pickup apparatus, including:

a solid-state image pickup element having a photoelectric conversionregion provided in each of pixels, a transistor provided for thephotoelectric conversion region of each of the pixels and including atleast a transfer transistor and an amplification transistor, thetransistor other than the transfer transistor being formed commonly tothe photoelectric conversion regions of the plural pixels, an isolationregion of a first conductivity type configured to isolate thephotoelectric conversion region and the transistor from each other, awell region of the first conductivity type having the photoelectricconversion region, the transistor, and the isolation region of the firstconductivity type formed therein, a contact portion formed on theisolation region of the first conductivity type configured to supply anelectric potential used to fix the well region of the first conductivitytype to a given electric potential, and a barrier formed in theisolation region of the first conductivity type between the contactportion and the photoelectric conversion region, and provided against aminority carrier injected from the contact portion;

a light condensing optical portion configured to condens an incidentlight; and

a signal processing portion configured to process a signal obtained inthe solid-state image pickup element by photoelectric conversion.

According to the image pickup apparatus of still another embodiment oryet another embodiment of the present invention, the image pickupapparatus includes the solid-state image pickup element of theembodiment or the solid-state image pickup element of anotherembodiment. Therefore, it is possible to suppress or prevent thegeneration of the dark current due to the flowing of the minoritycarrier into the photoelectric conversion region.

As set forth hereinabove, according to the present invention, since itis possible to suppress or prevent the generation of the dark currentdue to the flowing of the minority carrier into the photoelectricconversion region, it is possible to realize a solid-state image pickupelement for obtaining satisfactory image quality, and a high definitionimage pickup apparatus including the same.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a top plan view showing a schematic structure of a mainportion of a solid-state image pickup element according to a firstembodiment of the present invention;

FIG. 2 is a circuit diagram showing a circuit configuration of a pixelof the solid-state image pickup element shown in FIG. 1;

FIG. 3 is an enlarged top plan view showing a structure of the mainportion of the solid-state image pickup element shown in FIG. 1;

FIG. 4 is a cross sectional view taken on line A-A′ of FIG. 1;

FIG. 5 is a cross sectional view taken on line B-B′ of FIG. 3;

FIG. 6 is an energy band diagram in a cross section shown in FIG. 5;

FIG. 7 is a top plan view showing a schematic structure of a mainportion of a solid-state image pickup element according to a secondembodiment of the present invention;

FIG. 8 is an enlarged top plan view showing a structure of a portion inthe vicinity of a well contact shown in FIG. 7;

FIG. 9 is a top plan view showing a schematic structure of a mainportion of a solid-state image pickup element according to a thirdembodiment of the present invention;

FIG. 10 is a cross sectional view taken on line C-C′ of FIG. 9;

FIG. 11 is a top plan view showing a schematic structure of a mainportion of a solid-state image pickup element according to a fourthembodiment of the present invention;

FIG. 12 is a cross sectional view taken on line D-D′ of FIG. 11;

FIG. 13 is a top plan view showing a schematic structure of a mainportion of a solid-state image pickup element according to a fifthembodiment of the present invention;

FIG. 14 is a cross sectional view taken on line E-E′ of FIG. 13;

FIG. 15 is a top plan view showing a schematic structure of a mainportion of a solid-state image pickup element according to a sixthembodiment of the present invention;

FIG. 16 is a top plan view showing a schematic structure in which a partof the structure shown in FIG. 15 is changed;

FIG. 17 is a block diagram showing a schematic configuration of an imagepickup apparatus according to a seventh embodiment of the presentinvention;

FIGS. 18A and 18B are a view showing a structure obtained by carryingout a simulation, and a potential diagram taken on line Z-Z′ of FIG.18A, respectively;

FIG. 19 is a graph representing a relationship between a potential of apotential barrier, and a relative value of the number of electrons whichflow into a p⁺-type region;

FIG. 20 is a block diagram showing a schematic configuration of anexample of a CMOS type solid-state image pickup element;

FIG. 21 is a circuit diagram showing a circuit configuration of a unitpixel of the CMOS type solid-state image pickup element shown in FIG.20;

FIG. 22 is a top plan view showing an example of a planar layout of theunit pixel of the CMOS type solid-state image pickup element shown inFIG. 20;

FIG. 23 is a cross sectional view taken on line X-X′ of FIG. 22 in thecase where inter-element isolation is carried out by both an insulatorand a p-type region;

FIG. 24 is a cross sectional view taken on line X-X′ of FIG. 22 in thecase where the inter-element isolation is carried out by only the p-typeregion;

FIG. 25 is a circuit diagram showing a circuit configuration of a CMOStype solid-state image pickup element having a sharing pixelconfiguration;

FIG. 26 is a top plan view showing an example of a planar layout in thecase where a configuration is adopted such that an amplificationtransistor and the like are shared between two pixels;

FIG. 27 is a cross sectional view taken on line Y-Y′ of FIG. 26 in thecase where a pixel isolation region is composed of both an insulator anda p-type region;

FIG. 28 is a cross sectional view taken on line Y-Y′ of FIG. 26 in thecase where a pixel isolation region is composed of only the p-typeregion; and

FIG. 29 is an energy band diagram showing a situation in which anelectron injected from a well contact flows into a photodiode.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The preferred embodiments of the present invention will be described indetail hereinafter with reference to the accompanying drawings.

It is noted that the description will be given below in accordance withthe following order.

1. Outline of the Present Invention

2. First Embodiment

3. Second Embodiment

4. Third Embodiment

5. Fourth Embodiment

6. Fifth Embodiment

7. Sixth Embodiment

8. Seventh Embodiment

1. Outline of the Present Invention

An outline of the present invention will now be described prior to adescription of concrete embodiments.

A solid-state image pickup element of the present invention has thefollowing structure.

The solid-state image pickup element includes a photoelectric conversionregion provided in each of pixels, a transistor provided for aphotoelectric conversion region of each of the pixels, and an isolationregion of a first conductivity type for isolating the photoelectricconversion region and the transistor from each other.

In addition, the solid-state image pickup element includes a well regionof the first conductivity type having the photoelectric conversionregion, the transistor and the isolation region of the firstconductivity type formed therein, and also includes a contact portionformed on the isolation region of the first conductivity type forsupplying an electric potential used to fix the well region of the firstconductivity type to a given electric potential.

In addition, the solid-state image pickup element includes an impurityregion of the first conductivity type formed so as to extend in a depthdirection from a surface of the isolation region of the firstconductivity type in the isolation region of the first conductivity typebetween the contact portion and the photoelectric conversion region, andhaving a sufficiently higher impurity concentration than that of theisolation region of the first conductivity type.

Another solid-state image pickup element of the present invention hasthe following structure.

Another solid-state image pickup element includes a photoelectricconversion region provided in each of pixels.

In addition, another solid-state image pickup element includes atransistor provided for the photoelectric conversion region of each ofthe pixels, and including at least a transfer transistor and anamplification transistor. In this case, the transistor other than thetransfer transistor is formed commonly to the photoelectric conversionregions of the plural pixels.

In addition, another solid-state image pickup element includes anisolation region of a first conductivity type for isolating thephotoelectric conversion region and the transistor from each other, andalso includes a well region of the first conductivity type having thephotoelectric conversion region, the transistor, and the isolationregion of the first conductivity type formed therein.

Moreover, another solid-state image pickup element includes a contactportion formed on the isolation region of the first conductivity typefor supplying an electric potential to fix the well region of the firstconductivity type to a given electric potential.

Furthermore, another solid-state image pickup element includes a barrierformed in the isolation region of the first conductivity type betweenthe contact portion and the photoelectric conversion region, andprovided against a minority carrier injected from a contact.

Since the solid-state image pickup element of the present invention hasthe structure as described above, the impurity region of the firstconductivity type acts as the barrier against the minority carrier(electron or hole) injected from the contact portion. Also, sinceanother solid-state image pickup element of the present invention hasthe structure as described above, the barrier is formed against theminority carrier (electron or hole) injected from the contact portion.

For this reason, it is possible to suppress or prevent the minoritycarrier from flowing into the photoelectric conversion region.

Therefore, it is possible to suppress or prevent the generation of thedark current due to the flowing of the minority carrier into thephotoelectric conversion region.

In addition, an image pickup apparatus of the present invention includesthe solid-state image pickup element of the present invention describedabove; a light condensing optical portion for condensing an incidentlight; and a signal processing portion for processing a signal obtainedin the solid-state image pickup element described above by photoelectricconversion.

In addition, another image pickup apparatus of the present inventionincludes another solid-state image pickup element of the presentinvention described above; a light condensing optical portion forcondensing an incident light; and a signal processing portion forprocessing a signal obtained in another solid-state image pickup elementdescribed above by photoelectric conversion.

As a result, since it is possible to suppress or prevent the generationof the dark current due to the flowing of the minority carrier into thephotoelectric conversion region, it is possible to realize the highdefinition image pickup apparatus.

The principles of the present invention will now be described by usingsimulation results.

FIG. 18A is a view showing a structure obtained by carrying out thesimulation.

As shown in FIG. 18A, a structure is adopted such that a left sidep-type region and a right side p⁺-type region having a high impurityconcentration are joined to each other.

Firstly, electrons are disposed in the p-type region and are diffusedthereto as a minority carrier. At this time, it is assumed that arelaxation time is sufficiently long.

FIG. 18B is a potential diagram taken on line Z-Z′ of FIG. 18A.

As shown in FIG. 18B, a potential barrier against the electron is formedbetween the p-type region and the p⁺-type region on the right side ofthe p-type region. Also, the simulations are carried out while thepotential of the potential barrier is changed from 0 meV to 75 meV.Thus, the effect of the potential barrier is confirmed based on how manyelectrons enter into the p⁺-type region.

FIG. 19 shows a relationship between the potential of the potentialbarrier and a relative value of the number of electrons which flow intothe p⁺-type region as the simulation results.

As can be seen from FIG. 19, when an amount of electrons which flow intothe p⁺-type region in the case where there is no potential barrier (thepotential=0 meV) is set as 1, in the case of 30 meV, the flowing of theelectrons into the p⁺-type region is reduced to about 0.7 times, and inthe case of 60 meV, the flowing of the electrons into the p⁺-type regionis reduced to about 0.5 times.

When a difference in concentration between the p⁺-type region and thep-type region corresponding to the potential barrier is taken intoconsideration, a relationship between a difference between a differencebetween an intrinsic level of Si and a quasi-Fermi level of a p-type,and the impurity concentration is expressed by Expression (1):E _(i) −E _(fp) =k _(B) T ln(N _(A) /n _(i))   (1)

where E_(i) is an intrinsic level of Si, E_(fp) is a quasi-Fermi levelof p-type Si, k_(B) is a Boltzmann constant, T is a temperature (K),N_(A) is an impurity density, and n_(i) is an intrinsic density of Si.

From the calculation based on Expression (1), it is understood that atT=300K, when the concentration of the impurity is changed up to fivetimes, the potential barrier of about 42 meV is formed, and when theconcentration of the impurity is increased by one digit, the potentialbarrier of about 60 meV is formed.

From a combination of this result with the results shown in FIG. 19, itis understood that the impurity concentration of the p⁺-type region isincreased by one digit, whereby an amount of electrons flowing into thep⁺-type region can be reduced to about a half.

The simulation described above is carried out with respect to thestructure that the impurity region of the first conductivity type isformed as the potential barrier.

Even with the structure that a region having a lower potential than thatof the isolation region of the first conductivity type is formed as thepotential barrier, likewise, an amount of electrons flowing into thep⁺-type region can be reduced so as to correspond to the potential ofthe potential barrier.

2. First Embodiment

Subsequently, concrete embodiments of the present invention will bedescribed below.

FIG. 1 is a top plan view showing a schematic structure of a mainportion of a solid-state image pickup element according to a firstembodiment of the present invention. Also, FIG. 1 shows a top plan viewof a part (two pixel length×four pixels width) of an image pickup areaof the solid-state image pickup element.

It is noted that the entire configuration of the solid-state imagepickup element can be made identical to that shown in FIG. 20.

As shown in FIG. 1, a photoelectric conversion region 17 including aphotodiode is formed in each of pixels. Three transistors of a resettransistor 12, an amplification transistor 13, and a selectiontransistor 14 are formed continuously as a set between the photoelectricconversion regions 17 of the pixels in an upper row, and thephotoelectric conversion regions 17 of the pixels in a lower row.

A well contact 18 is formed in an intermediate position between eachadjacent two sets of these transistors 12, 13 and 14.

In addition, a p-type isolation region 5 is formed between eachhorizontally and vertically adjacent photoelectric conversion regions 17of the pixels.

The photoelectric conversion region 17 of the pixel is connected to afloating diffusion region FD through a transfer gate TG of the transfertransistor 11. The floating diffusion region FD is connected to a gateof the amplification transistor 13 and an n⁺-type region 6 of the resettransistor 12 through wirings each indicated by a broken line.

Also, the photoelectric conversion regions 17 of the right and left sidetwo pixels are connected commonly to the floating diffusion region FD,the amplification transistor 13, and the reset transistor 12.

The transfer transistor 11 transfers the electric charges generated inthe photoelectric conversion region 17 by the photoelectric conversionto the floating diffusion region FD.

The reset transistor 12 discharges the electric charges accumulated inthe floating diffusion region FD to reset the floating diffusion regionFD.

The amplification transistor 13 is connected in gate thereof to thefloating diffusion region FD, and amplifies a signal voltage so as tocorrespond to an amount of electric charges in the floating diffusionregion FD.

When the selection transistor 14 is turned ON based on the supply of avoltage from a selection line SEL, the selection transistor 14 sends thesignal voltage amplified by the amplification transistor 13 to avertical signal line 15.

In addition, FIG. 2 is a circuit diagram showing a circuit configurationof the pixel of the solid-state image pickup element shown in FIG. 1.

As shown in FIG. 2, the pixel includes photodiodes PD1 and PD2 eachserving as the photoelectric conversion element, the transfer transistor11, the reset transistor 12, the amplification transistor 13, theselection transistor 14, the vertical signal line 15, and a floatingdiffusion region C_(FD).

The reset transistor 12, the transfer transistor 11, and the selectiontransistor 14 are connected to a reset line RST, a transfer line TX, anda horizontal selection line SEL, respectively, and are driven inaccordance with pulse signals from a vertical selecting circuit (referto FIG. 20).

The photodiode PD is connected in one end thereof to the ground, andconverts a light made incident thereto into electrons (or holes) by thephotoelectric conversion to accumulate therein the resulting electriccharges (electrons or holes). The photodiode PD1 and PD2 are connectedto the floating diffusion region C_(FD) through the respective transfertransistor 11. Also, by turning ON the transfer lines TX1 and TX2, theelectric charges from the photodiodes PD1 and PD2 are transferred to thefloating diffusion region C_(FD).

The floating diffusion region C_(FD) is connected in one end thereof toa gate electrode of the amplification transistor 13, and is furtherconnected in one end thereof to the vertical signal line 15 through theselection transistor 14. Plural unit pixels are connected to thevertical signal line 15. Thus, the selection transistor 14 connected toa certain specific vertical signal line 15 is turned ON, therebyoutputting a signal from the desired photodiode. The vertical signalline 15 is connected to a transistor (constant current source) 16 biasedby a constant voltage, and composes a so-called source follower circuitin combination with the amplification transistor 13.

Also, as shown in FIG. 1, the floating diffusion region FD, the resettransistor 12, the amplification transistor 13, and the selectiontransistor 14 are shared between two pixels. For this reason, thetransfer transistors 11 of the two pixels are connected to the floatingdiffusion region FD, the reset transistor 12, and the amplificationtransistor 13 which are common thereto.

With a structure that only the p-type region exists between the wellcontact and the photoelectric conversion region, the electrons injectedfrom the well contact are diffused into the n-type region to turn intothe dark current. This is a problem.

In order to cope with such a situation, in the first embodiment, asshown in FIG. 1 and FIG. 3 as an enlarged top plan view of FIG. 1, ap⁺-type region 21 is formed as an electron diffusion preventing regionbetween the well contact 18 and the photoelectric conversion region 17.

Specifically, a stripe-like p⁺-type region 21 is laterally formedbetween the photoelectric conversion regions 17 of the pixels of theupper row and the photoelectric conversion regions 17 of the pixels ofthe lower row, and the well contact 18 and the three transistors 12, 13and 14. That is to say, the p⁺-type region 21 is formed so as to have aplanar pattern formed as a pattern which surrounds the n⁺-type region 6of the three transistors 12, 13 and 14, and the well contact 18.

In addition, the p⁺-type region 21 is formed so as to have a planarpattern formed as a pattern existing between the n⁺-type region 6 of thereset transistor 12, and the well contact 18, that is, a longitudinalpattern vertical to the stripe-like pattern.

By forming the p⁺-type region 21, a barrier is formed between thephotoelectric conversion region 17 of the pixel, and the well contact18, thereby making it possible to suppress the flowing of the electronsinto the photoelectric conversion region 17.

It is noted that since the electrons generated from the well contact 18needs to be discarded, preferably, a structure is adopted such that thebarrier is not formed in at least one portion of the circumference ofthe well contact 18, thereby allowing the electrons to be discarded inthe n-type region.

Thus, in the first embodiment, as shown in FIGS. 1 and 3, the p⁺-typeregion 21 serving as the barrier is not formed on a side (on a left sidein FIG. 1) of the n⁺-type region 6 of the selection transistor 14, ofthe circumference of the well contact 18. The n⁺-type region 6 of theselection transistor 14, as shown in the circuit diagram of FIG. 2, isconnected to the vertical signal line 15.

In such a manner, the electrons can be discarded in the n⁺-type region 6of the selection transistor 14 connected to the vertical signal line 15.

As described above, in FIGS. 1 and 3, the electrons generated in thewell contact 18 are discarded in the n⁺-type region 6 connected to thevertical signal line 15.

The reason for this is because the n⁺-type region 6 provided on thereset transistor 12 side of the well contact 18 is connected to thefloating diffusion region FD, and thus it is possible that the electronsgenerated are detected as the dark current.

On the other hand, since the vertical signal line 15 is provided in thesubsequent stage of an output buffer, even when a small amount ofelectrons flows into the n⁺-type region 6, an influence exerted on thevertical signal line 15 is small.

In the structure of the first embodiment, an impurity concentration ofthe p-type isolation region is in the range of about 1×10¹⁷ to about5×10¹⁸ cm⁻³, and an impurity concentration of the p⁺-type region 21serving as the barrier is in the range of about 1×10¹⁸ to about 1×10²⁰cm⁻³.

At this time, for the purpose of structuring the sufficient barrier,preferably, the impurity concentration of the p⁺-type region 21 is about5 to 100 times as high as that of the p-type isolation region 5.

As described above, the structure is adopted such that the p⁺-typeregion 21 has the sufficiently higher impurity concentration than thatof the p-type isolation region 5.

In addition, in the first embodiment, the p⁺-type region 21 serving asthe barrier is formed so as to be slightly offset to the inside from aboundary between the photoelectric conversion regions 17 of the pixels.As a result, it is possible to prevent an electric field between thebarrier formed by the p⁺-type region 21 and the photoelectric conversionregion 17 from being increased more than necessary. Thus, it is possibleto reduce the dark current.

In addition, FIG. 4 shows a cross sectional view taken on line A-A′ ofFIG. 1.

As shown in FIG. 4, the photoelectric conversion region 17, the n⁺-typeregion 6 of the transistor, and the p-type isolation region 5 are formedin the p-type well region 2 having a low impurity concentration andformed on the semiconductor substrate 1.

The well contact 18 is formed as a contact portion on the p-typeisolation region 5. Also, an electric potential is supplied through thewell contact 18, thereby making it possible to fix the p-type wellregion 2 to a given electric potential. A p⁺-type region 7 for reducinga contact resistance is formed in a portion under the well contact 18 ofthe p-type isolation region 5.

Also, the p⁺-type region 21 serving as the barrier is formed in thep-type isolation region 5 between the p⁺-type region 7 under the wellcontact 18, and the photoelectric conversion region 17 composed of ann-type electric charge accumulating region 3 and a p⁺-type positiveelectric charge accumulating region 4.

For the purpose of preventing the electrons from flowing into thephotoelectric conversion region 17, the p⁺-type region 21 serving as thebarrier extends in a depth direction from the surface of the p-typeisolation region 5 to be formed deeply to a certain extent. Althoughdepending on the structures (a size, a layout and the like) of theregions, the p⁺-type region 21 serving as the barrier can be formed soas to have a depth of about 10 nm to about 1 μm.

In addition, the contact 20 which is connected to the vertical signalline 15 is formed on the n⁺-type region 6 of the selection transistor14.

Note that, although in FIG. 4, the p⁺-type region 21 serving as thebarrier is formed to the same depth as that of the p-type isolationregion 5, the p-type isolation region 5 and the p⁺-type region 21 maynot have necessarily the same depth. That is to say, one of the p-typeisolation region 5 and the p⁺-type region 21 may be deeper than theother, or may be shallower than the other.

In addition, likewise, FIG. 5 shows a cross sectional view taken on lineB-B′ of FIG. 3.

As shown in FIG. 5, the p⁺-type region 21 serving as the barrier isformed between the p⁺-type region 7 under the well contact 18, and then⁺-type region 6 of the reset transistor 12 connected to the flowingdiffusion region FD. As a result, the electrons e⁻ generated in the wellcontact 18 are prevented from flowing into the floating diffusion regionFD because the electrons e⁻ are blocked by the p⁺-type region 21.

FIG. 6 shows an energy band diagram in the cross section of FIG. 5.

In the first embodiment, the p⁺-type region 21 serving as the barrier isformed between the well contact 18 and the photoelectric conversionregion 17. Therefore, the electrons e⁻ as the minority carriers injectedfrom the well contact 18 are hardly injected to the photoelectricconversion region 17 because of the presence of the barrier. Also, theelectrons e⁻ are discharged to the n⁺-type region 6 provided on the sideon which no barrier is formed and connected to the vertical signal line15.

It is noted that in the first embodiment, the stripe-like p⁺-type region21 in the transverse direction of FIG. 1, and the p⁺-type region 21 inthe longitudinal direction of FIG. 1 may be simultaneously formed byusing the same mask, or may be formed in order by using different masks,respectively.

In the case of the latter forming method, the impurity concentrations ofboth the p⁺-type regions 21 may be identical to each other or may beslightly different from each other.

3. Second Embodiment

FIG. 7 is a top plan view showing a schematic structure of a mainportion of a solid-state image pickup element according to a secondembodiment of the present invention. Also, FIG. 8 is an enlarged topplan view showing a structure of a portion in the vicinity of a wellcontact shown in FIG. 7.

In the second embodiment, the p⁺-type region 21 serving as the barrieris formed between the well contact 18 and the photoelectric conversionregion 17.

That is to say, the p⁺-type region 21 is not formed between the n⁺-typeregion 6 of the reset transistor 12, and the well contact 18, althoughthe p⁺-type region 21 is formed there in the first embodiment.

As a result, as indicated by arrows of FIG. 8, the electrons e⁻generated from the well contact 18 flow into the n⁺-type regions 6 atthe both right and left sides of the well contact 18.

Since other structures in the second embodiment are the same as those inthe first embodiment shown in FIGS. 1 to 5, the constituent elementscorresponding to those in the first embodiment are designated by thesame reference numerals or symbols, respectively, and a repeateddescription is omitted here.

In the second embodiment, the p⁺-type region 21 is not formed betweenthe n⁺-type region 6 of the reset transistor 12, and the well contact18. To this end, there is the possibility that the electrons e⁻ flowfrom the n⁺-type region 6 of the reset transistor 12 into the floatingdiffusion region FD through the wiring.

However, since the reset operation is carried out before readingoperation, the influence of the flowing of the electrons into thefloating diffusion region FD is not larger than that in the case of thephotoelectric conversion region 17.

In the second embodiment, the planar pattern of the p⁺-type region 21serving as the barrier has a simple structure that the planar pattern ofthe p⁺-type region 21 is composed of only the stripe pattern in thetransverse direction. Therefore, a mask for the impurity implantationcan have a simpler structure than that in the case of the structure inthe first embodiment.

As a result, it is possible to simplify the manufacturing process and tocause the mask to be easily formed. In particular, when an intervalbetween the pixels becomes short along with the progress of the multiplepixel promotion, a width of the p⁺-type region 21 serving as the barrieralso become narrow and thus it becomes difficult to form a mask having acomplicated shape. Therefore, the structure in the second embodimentbecomes effective.

4. Third Embodiment

FIG. 9 is a top plan view showing a schematic structure of a mainportion of a solid-state image pickup element according to a thirdembodiment of the present invention. Also, FIG. 10 is a cross sectionalview taken on line C-C′ of FIG. 9.

In the third embodiment, the disposition of the transistors within thepixel area is changed, whereby the n⁺-type regions 6 which are connectedto power sources VDD, respectively, are disposed close to the wellcontact 18 so as to face both sides of the well contact 18,respectively.

That is to say, in the first embodiment, the three transistors 12, 13and 14 are disposed as the continuous one set. On the other hand, in thethird embodiment, as shown in FIG. 9, the reset transistor 12 isdisposed independently of other two transistors, that is, theamplification transistor 13 and the selection transistor 14. Inaddition, of the two n⁺-type regions 6 of the reset transistor 12 andthe amplification 13, the p⁺-type regions 6 connected to the powersources VDD, respectively, are disposed on the side of the well contact18.

In addition, in the third embodiment, with regard to each of the pixels,the reset transistor 12 on the upper side of the photoelectricconversion region 17 of the pixel in each of the rows is connected tothe amplification transistor 13 and the selection transistor 14 on thelower side of the photoelectric conversion region 17 of the pixel ineach of the rows. For this reason, positions each indicated by a brokenline are different from those in the first embodiment shown in FIG. 1.

Also, the p⁺-type region 21 serving as the barrier is formed onlybetween the well contact 18 and the photoelectric conversion region 17so as to have the stripe-like planar pattern in the transverse directionsimilarly to the case of the second embodiment shown in FIG. 7.

Since other structures in the third embodiment are the same as those inthe second embodiment shown in FIGS. 7 and 8, the constituent elementscorresponding to those in the second embodiment are designated by thesame reference numerals or symbols, respectively, and a repeateddescription is omitted here.

Since in the third embodiment, the structure described above is adopted,the electrons injected from the well contact 18 are discharged to then⁺-type regions 6 connected the respective power source lines VDD anddisposed on the right and left sides of the well contact 18.

Therefore, since the electrons injected from the well contact 18 do notflow into the floating diffusion region FD, the dark current can befurther reduced as compared with the case of the second embodiment.

5. Fourth Embodiment

FIG. 11 is a top plan view showing a schematic structure of a mainportion of a solid-state image pickup element according to a fourthembodiment of the present invention. Also, FIG. 12 is a cross sectionalview taken on line D-D′ of FIG. 11.

In the fourth embodiment, an insulator 8 and the p-type isolation region5 under the insulator 8 are used as the isolation region for carryingout the isolation between the photoelectric conversion regions 17 andthe like of the pixels. The insulator 8 is formed so as to cover thep-type isolation region 5.

In the fourth embodiment as well, the p⁺-type region 21 serving as thebarrier is formed only between the well contact 18 and the photoelectricconversion region 17 so as to have the stripe-like planar pattern in thetransverse direction similarly to the case of the third embodiment.

Since other structures in the fourth embodiment are the same as those inthe third embodiment shown in FIGS. 9 and 10, the constituent elementscorresponding to those in the third embodiment are designated by thesame reference numerals or symbols, respectively, and a repeateddescription is omitted here.

The p⁺-type region 21 serving as the barrier may be formed by carryingout the impurity implantation before the insulator 8 is formed, or maybe formed by carrying out the impurity implantation through theinsulator 8 after the insulator 8 is formed.

In the fourth embodiment, the reset transistor 12 is formedindependently of the amplification transistor 13 and the selectiontransistor 14, and the n⁺-type regions 6 connected to the respectivepower source lines are disposed on the right and left sides of the wellcontact 18, respectively.

On the other hand, similarly to the case of the first embodiment, thestructure may also be adopted such that the three transistors 12, 13 and14 are formed as one set.

In the fourth embodiment, the p⁺-type region 21 serving as the barrieris formed in the transverse stripe-like shape.

On the other hand, similarly to the case of the first embodiment, thestructure may also be adopted such that the p⁺-type region 21 serving asthe barrier is formed only on one side of the right and left sides ofthe well contact 18, and the electrons are discharged to only then⁺-type region 6 on the other hand connected to the power source.

In addition, in the fourth embodiment, the disposition of thetransistors is made identical to that in the third embodiment.

On the other hand, there may also be adopted any other suitabletransistor disposition such as the transistor dispositions of the firstand second embodiments.

6. Fifth Embodiment

FIG. 13 is a top plan view showing a schematic structure of a mainportion of a solid-state image pickup element according to a fifthembodiment of the present invention. Also, FIG. 14 is a cross sectionalview taken on line E-E′ of FIG. 13.

In the fifth embodiment, as shown in FIGS. 13 and 14, the isolationregion composed of the insulator 8 is not formed between the wellconstant 18, and the n⁺-type regions 6 provided on the right and theleft sides of the well contact 18, respectively.

Also, a p⁺-type region 21 serving as the barrier is formed in atransverse stripe-like shape in the portion in which no insulator 8 isformed so as to surround the well contact 18.

Since the flowing of the electrons injected from the well contact 18into the photoelectric conversion region 17 is suppressed by the p⁺-typeregion 21 serving as the barrier, the electrons injected from the wellcontact 18 are discharged to the n⁺-type regions 6 on the right and leftsides of the well contact 18.

It is noted that although in FIGS. 13 and 14, the p⁺-type region 21 isformed so as to contact the insulator 8, even when the p⁺-type region 21does not contact the insulator 8, it is only necessary to form thep⁺-type region 21 between the well contact 18 and the insulator 8.

In the fifth embodiment, the structure described above is adopted,whereby after the insulator 8 is formed, the p⁺-type region 21 can beformed similarly to the case of the first embodiment.

In addition, since the p⁺-type region 21 can be disposed away from thephotoelectric conversion region 17, the dark current can be furtherreduced.

Since other structures (the structures other than the insulator 8 andthe p⁺-type region 21) in the fifth embodiment are the same as those inthe fourth embodiment shown in FIGS. 11 and 12, the constituent elementscorresponding to those in the fourth embodiment are designated by thesame reference numerals or symbols, respectively, and a repeateddescription thereof is omitted here.

It is noted that in each of the fourth and fifth embodiments describedabove, the p-type isolation region 5 is formed under the insulator 8 soas to contact the insulator 8.

On the other hand, for example, a p⁺-type region may be further formedin a portion (surface portion), contacting the insulators 8, of thep-type isolation region 5, thereby suppressing the influence (the darkcurrent and the like) of the interface level in the vicinity of theinterface with the insulator 8 of the semiconductor.

7. Sixth Embodiment

FIG. 15 is a top plan view showing a schematic structure of a mainportion of a solid-state image pickup element according to a sixthembodiment of the present invention. Also, FIG. 16 is a top plan viewshowing a schematic structure in which a part of the structure shown inFIG. 15 is changed.

In each of the first to fifth embodiments, the barrier against theelectron is formed by the p⁺-type region 21.

On the other hand, in the sixth embodiment, an n-type impurity isimplanted into the isolation region 5 located in the inner side withrespect to the boundary between the p-type isolation region 5 and thephotoelectric conversion region 17 to make the relative potential lowerthan that of the isolation region 5, thereby forming the barrier againstthe electrons.

For example, when the impurity concentration of the isolation region 5is set as about 5×10¹⁸ cm⁻³, an n-type impurity having the impurityconcentration of about 4×10¹⁸ cm⁻³. As a result, a concentrationdifference of about five times is created between the circumference ofthe well contact 18, and the p-type isolation region 5 in thecircumference of the photoelectric conversion region 17, thereby makingit possible to form the barrier.

When the n-type impurity implantation is used as the impurityimplantation as well, for the threshold value adjustment, which iscarried out for the channel portion of the transistor, the n-typeimpurity implantation can be realized without increasing the number ofprocesses.

In the structure shown in FIG. 15, the n-type impurity is implanted intoa transversely extending stripe-like region 23 which surrounds thep⁺-type region 7 under the well contact 18, and the n⁺-type regions 6 ofthe reset transistor 12, the amplification transistor 13 and theselection transistor 14.

As a result, since the potential can be made lower than that of theisolation region 5 in the circumference of the stripe-like region 23.Therefore, the electrons injected from the well contact 18 can bedischarged to the right and left side n⁺-type regions 6.

In the structure shown in FIG. 16, an n-type impurity is implanted intoa region 24 which surrounds the p⁺-type region 7 under the well contact18, and the n⁺-type region 6 of the transistor (the selection transistor14 in the same layout as that of FIG. 1) on the left side of the p⁺-typeregion 7. Also, no n-type impurity is implanted into the circumferenceof the n⁺-type region 6 of the transistor (the reset transistor 12 inthe same layout as that of FIG. 1) on the right side of the p⁺-typeregion 7.

As a result, the potential can be made lower than that of the isolationregion 5 in the circumference of the region 24. Therefore, the electronsinjected from the well contact 18 can be discharged to only the leftside n⁺-type region 6.

It is noted that to what extent the n-type impurity is implanted on theleft side of the well contact 18 is not shown in FIG. 16. For example,in the case of the same layout as that of FIG. 1, it is only necessaryto implant the n-type impurity into the edge on the well contact 18 sideof the gate electrode of the selection transistor 14 or into a portionclose to a portion under the gate electrode of the selection transistor14.

It is noted that with regard to the structure of the barrier for theelectron as the minority carrier injected from the well contact, astructure other than the structures (the p⁺-type region 21, and theregions 23 and 24 each having the lowered potential) in each of thefirst to sixth embodiments is also expected.

For example, it is also possible to form a barrier composed of aninsulator between the well contact in the p-type isolation region, andthe photoelectric conversion region, or to form a barrier composed of aregion whose band gap is largely different from that of each of otherportions because elements contained therein are different from thosecontained in each of other portions.

In each of the first to sixth embodiments described above, the threetransistors, that is, the reset transistor 12, the amplificationtransistor 13 and the selection transistor 14 which are formed commonlyto the two pixels are formed between the photoelectric conversionregions 17 in the pixel rows. However, the positions of the transistorswhich are formed commonly to plural pixels are by no means limited sucha position between the rows. That is to say, any other suitabledisposition can also be adopted such that the transistors, for example,are disposed between the columns, or between the rows and between thecolumns.

In each of the first to sixth embodiments described above, the threetransistors 12, 13 and 14 are shared among plural pixels.

The present invention can also be simply applied to a structure thatthose transistors are provided every one pixel.

However, since in this structure, the distance between the well contactand the photoelectric conversion region is relatively short, preferably,the planar layout of the pixel is devised so that the p⁺-type regionserving as the barrier can be formed.

For example, since in the structure shown in FIG. 22, the well contact68 is considerably close to the photoelectric conversion region 67, itis difficult to form the p⁺-type region between the well contact 68 andthe photoelectric conversion region 67. Then, all it takes is that astructure that the p⁺-type region under the well contact, and thephotoelectric conversion region are isolated from each other by theisolation region composed of the insulator (refer to FIG. 14 shown inJapanese Patent No. 4,075,773) is adopted and the p⁺-type region servingas the barrier is further formed under the isolation region composed ofthe insulator similarly to the case of the fourth embodiment. Inaddition, a structure may also be adopted such that the interval betweenthe well contact and the photoelectric conversion region is made widerthan that in the structure shown in FIG. 2, thereby allowing the p⁺-typeregion to be formed between the well contact and the photoelectricconversion region.

When the well contact is formed in the corner of the photoelectricconversion region as with the structure shown in FIG. 22, for example,the p⁺-type region serving as the barrier is formed so as to have an Lletter-like planar pattern between the well contact and thephotoelectric conversion region.

In each of the first to sixth embodiments described above, the fourtransistors, that is, the transfer transistor 11, the reset transistor12, the amplification transistor 13, and the selection transistor 14 areprovided in each of the pixels.

The present invention is by no means limited to the structure that thosefour transistors are provided in each of the pixels, and thus contains astructure as well that two transistors or three transistors are providedin each of the pixels. It is only necessary to provide at least thetransfer transistor and the amplification transistor in each of thepixels. Also, the transfer transistor may be provided in each of thepixels, and the transistors other than the transfer transistor, that is,the reset transistor, the amplification transistor, and the selectiontransistor may be provided commonly to plural pixels.

In each of the first to sixth embodiments described above, in thepresent invention, the first conductivity type is set as the p-type, andthe second conductivity type is set as the n-type.

The present invention contains a structure as well that the conductivitytype is reversed, that is, the first conductivity type is set as then-type and the second conductivity type is set as the p-type. In thisstructure, the electric charge accumulating region of the photoelectricconversion region is of the p-type, the n-type isolation region isformed in the circumference of the well contact, and the n⁺-type regionis provided between the well contact and the photoelectric conversionregion, thereby forming the barrier.

In addition, in the present invention, the semiconductor materialcomposing the solid-state image pickup element composed of thesemiconductor substrate, the well region, and the like is by no meanslimited to silicon which is normally used, and any other suitablesemiconductor material can also be used.

8. Seventh Embodiment

FIG. 17 is a block diagram showing a schematic configuration of an imagepickup apparatus according to a seventh embodiment of the presentinvention.

As shown in FIG. 17, the image pickup apparatus 40 is composed of animage photographing system having a lens system 41, a solid-state imagepickup element (image sensor) 42, a Digital Signal Processor (DSP) 43, amemory 44, a display device 45, a recording device 46, a manipulationsystem 47, and a power source system 48.

The lens system 41 is a form of a condensing optical system forcondensing an incident light.

The DSP 43 is a form of a signal processing portion for processing asignal obtained in the solid-state image pickup element 42 by thephotoelectric conversion.

Thus, the solid-state image pickup element according to theabove-described embodiments of the present invention is used as thesolid-state image pickup element 42.

Since the image pickup apparatus 40 is composed of the solid-state imagepickup element according to the first embodiment of the presentinvention, thereby reducing the dark current, it is possible to realizethe high definition image pickup apparatus 40.

It is noted that the image pickup apparatus of the present invention isby no means limited to the configuration shown in FIG. 17, and thus thepresent invention can be applied to an image pickup apparatus as long asthis image pickup apparatus uses the solid-state image pickup element.

For example, the solid-state image pickup element may have a form inwhich the solid-state image pickup element is formed as one chip, or mayhave a module-like form which has an image capturing function and intowhich an image capturing portion and a signal processing portion or anoptical system are collectively packaged.

The image pickup apparatus of the present invention can be applied tovarious kinds of image pickup apparatuses such as a camera or a mobileapparatus having an image capturing function. In addition, a fingerprintdetecting apparatus or the like is contained in the present invention ina broad sense of “the image capturing.”

The present invention is by no means limited to the embodimentsdescribed above, and thus various kinds of constitutions can be adoptedwithout departing from the subject matter of the present invention.

The present application contains subject matter related to thatdisclosed in Japanese Priority Patent Application JP 2010-075400 filedin the Japan Patent Office on Mar. 29, 2010, the entire content of whichis hereby incorporated by reference.

What is claimed is:
 1. A solid-state image pickup element with aplurality of pixels, comprising, for at least one pixel: a photoelectricconversion region; at least one transistor; an isolation region of afirst conductivity type configured to isolate said photoelectricconversion region and said at least one transistor from each other; awell region of the first conductivity type having said photoelectricconversion region, said at least one transistor, and said isolationregion of the first conductivity type formed therein; a contact portionon said isolation region of the first conductivity type configured tosupply an electric potential used to fix said well region of the firstconductivity type to a given electric potential; and an impurity regionof the first conductivity type extending in a depth direction from asurface of said isolation region of the first conductivity type in saidisolation region of the first conductivity type between said contactportion and said photoelectric conversion region, and having asufficiently higher impurity concentration than that of said isolationregion of the first conductivity type.
 2. The solid-state image pickupelement according to claim 1 wherein the at least one transistorcomprises a plurality of transistors including at least a transfertransistor and an amplification transistor, a transistor other than saidtransfer transistor being common to the photoelectric conversion regionsof the plural pixels.
 3. The solid-state image pickup element accordingto claim 2, further comprising: two regions of the second conductivitytype of two of said transistors are disposed so as to face both sides ofsaid contact portion, respectively; and an insulator formed on a portionof said isolation region of the first conductivity type, except for aportion between said two regions of the second conductivity type of saidtwo transistors disposed so as to face both sides of said contactportion, wherein, said impurity region of the first conductivity type isformed so as to have a planar pattern (a) connected to said two regionsof the second conductivity type of said two transistors and (b)surrounding said contact portion in a portion, having no isolationregion formed therein, of said isolation region of the firstconductivity type.
 4. The solid-state image pickup element according toclaim 1, wherein said impurity region of the first conductivity type isformed so as to have a planar pattern including a surface coplanar withsurfaces of a region of a second conductivity type of said at least onetransistor and said contact portion.
 5. The solid-state image pickupelement according to claim 1, further comprising an insulator on saidisolation region of the first conductivity type.
 6. A solid-state imagepickup element with a plurality of pixels, at least one pixelcomprising: a photoelectric conversion region; a plurality oftransistors provided for said photoelectric conversion region includingat least a transfer transistor and an amplification transistor, atransistor other than said transfer transistor being common to thephotoelectric conversion regions of said plurality of pixels; anisolation region of a first conductivity type configured to isolate saidphotoelectric conversion region and said transistors from each other awell region of the first conductivity type having said photoelectricconversion region, said transistors, and said isolation region of thefirst conductivity type formed therein; a contact portion on saidisolation region of the first conductivity type and configured to supplyan electric potential used to fix said well region of the firstconductivity type to a given electric potential; and a barrier in saidisolation region of the first conductivity type between said contactportion and said photoelectric conversion region, said barrier actingagainst a minority carrier injected from said contact portion.
 7. Thesolid-state image pickup element according to claim 6, wherein saidbarrier is a region which is formed so as to surround said contactportion and a region of a second conductivity type of at least one ofsaid transistors within said isolation region of the first conductivitytype, and has a lower potential than that of said isolation region ofthe first conductivity type by introducing an impurity of the secondconductivity type.
 8. The solid-state image pickup element apparatusaccording to claim 6, wherein said impurity region of the firstconductivity type is formed so as to have a planar pattern including asurface coplanar with surfaces of region of a second conductivity typeof said transistors and said contact portion.
 9. The solid-state imagepickup element according to claim 6, further comprising an insulatorformed so as to cover said isolation region of the first conductivitytype.
 10. The solid-state image pickup element apparatus according toclaim 6, further comprising: two regions of the second conductivity typeof said transistors are disposed so as to face both sides of saidcontact portion, respectively; and an insulator formed on a portion ofsaid isolation region of the first conductivity type, except for aportion between said two regions of the second conductivity type of saidtransistors are disposed so as to face both sides of said contactportion, respectively, wherein, said impurity region of the firstconductivity type is formed so as to have a planar pattern (a) connectedto said two regions of the second conductivity type of said transistorsand (b) surrounding said contact portion in a portion, having noisolation region formed therein, of said isolation region of the firstconductivity type.
 11. An image pickup apparatus, comprising: (a) asolid-state image pickup element with a plurality of pixels eachincluding (1) a photoelectric conversion region, (2) at least onetransistor, (3) an isolation region of a first conductivity typeconfigured to isolate said photoelectric conversion region and said atleast one transistor from each other, (4) a well region of the firstconductivity type having said photoelectric conversion region, said atleast one transistor, and said isolation region of the firstconductivity type formed therein, (5) a contact portion on saidisolation region of the first conductivity type and configured to supplyan electric potential used to fix said well region of the firstconductivity type to a given electric potential, and (6) an impurityregion of the first conductivity type beneath said contact portion andextending in a depth direction from a surface of said isolation regionof the first conductivity type in said isolation region of the firstconductivity type between said contact portion and said photoelectricconversion region, and having a sufficiently higher impurityconcentration than that of said isolation region of the firstconductivity type; (b) a light condensing optical portion configured tocondense an incident light; and (c) a signal processing portionconfigured to process a signal obtained in said solid-state image pickupelement by photoelectric conversion.
 12. The image pickup apparatusaccording to claim 11, wherein said at least one transistor comprises aplurality of transistors including at least a transfer transistor and anamplification transistor, and the transistor other than said transfertransistor is formed commonly to the photoelectric conversion regions ofthe plural pixels.
 13. The image pickup apparatus according to claim 12,wherein said impurity region of the first conductivity type is formed soas to have a planar pattern including a surface coplanar with surfacesof a region of a second conductivity type of said at least onetransistor and said contact portion.
 14. The image pickup apparatusaccording to claim 12, further comprising: two regions of the secondconductivity type of two of said transistors are disposed so as to faceboth sides of said contact portion, respectively; and an insulatorformed on a portion of said isolation region of the first conductivitytype, except for a portion between said two regions of the secondconductivity type of said two transistors disposed so as to face bothsides of said contact portion, respectively, wherein, said impurityregion of the first conductivity type is formed so as to have a planarpattern (a) connected to said two regions of the second conductivitytype of said two transistors and (b) surrounding said contact portion ina portion, having no isolation region formed therein, of said isolationregion of the first conductivity type.
 15. The image pickup apparatusaccording to claim 11, further comprising an insulator on said isolationregion of the first conductivity type.
 16. An image pickup apparatus,comprising: (a) a solid-state image pickup element a plurality of pixelseach including (1) a photoelectric conversion region, (2) a plurality oftransistors including at least a transfer transistor and anamplification transistor, a transistor other than said transfertransistor being common to the photoelectric conversion regions of theplural pixels, (3) an isolation region of a first conductivity typeconfigured to isolate said photoelectric conversion region and saidtransistors from each other, (4) a well region of the first conductivitytype having said photoelectric conversion region, said transistors, andsaid isolation region of the first conductivity type formed therein, (5)a contact portion on said isolation region of the first conductivitytype and configured to supply an electric potential used to fix saidwell region of the first conductivity type to a given electricpotential, and (6) a barrier in said isolation region of the firstconductivity type between said contact portion and said photoelectricconversion region, said barrier acting against a minority carrierinjected from said contact portion; (b) a light condensing opticalportion configured to condense an incident light; and (c) a signalprocessing portion configured to process a signal obtained in saidsolid-state image pickup element by photoelectric conversion.
 17. Theimage pickup apparatus according to claim 16, wherein said barrier ofthe first conductivity type is formed so as to have a planar patternincluding a surface coplanar with surfaces of a region of a secondconductivity type of said transistors and said contact portion.
 18. Theimage pickup apparatus according to claim 16, further comprising aninsulator on said isolation region of the first conductivity type. 19.The image pickup apparatus according to claim 16, further comprising:two regions of the second conductivity type of said transistors disposedso as to face both sides of said contact portion, respectively; and aninsulator on a portion of said isolation region of the firstconductivity type, except for a portion between said two regions of thesecond conductivity type of said transistors disposed so as to face bothsides of said contact portion, respectively, of said isolation region ofthe first conductivity type, wherein, said barrier of the firstconductivity type is formed so as to have a planar pattern (a) connectedto said two regions of the second conductivity type of said transistorand (b) surrounding said contact portion in a portion, having noisolation region formed therein, of said isolation region of the firstconductivity type.